Performance
- -Available ranges: max 0-20 slpm, min 0-0.5 sccm/0-500 sμlm (see Part Numbers tab for stock ranges)
- -Steady state control range: 0.01% – 100% of full scale.
- -Standard accuracy calibration, NIST-traceable: +/- (0.6% of the reading on most products)
- -Optional high-accuracy calibration, NIST-traceable: +/- (0.5% of the reading on most products)
- -Repeatability: +/- 0.1% of reading + 0.02% of full scale
- -Typical control response time constant: 50-100 ms (as low as 25 ms with PID tuning)
- -Pneumatic valve leak integrity (MCV only): 1 x 10-9 atm scc/sec Helium max
- -No warm-up time required