Full Scale Ranges (N2 equivalent)

51 SLM~ 500 SLM

Maximum lnlet P ressure

150 psig

Normal Operating Pressure  Differential

(with atmospheric pressure at the. MFCoutlet)

 45 to 75 psid

Control Range

2% to 100% of F.S 

Accuracy (analog)

(including non-linearity, hysteresis,

and non-repeata bility referenced to 760mmhg and 0°c)

±1.0% of F.S 

Repeatability

±0.2% of F.S

Resolution

1.0% of F.S 

Temperature Coefficients Zero Span

<0.05 % of F.S./°C

<0.05 % of F.S.

Warm-up Time (to within 0.2% of F.S. of steady state performance)

< 2 min

Controller Settling Time

< 2 sec

Pressure Coefficient

<0.02 % of Rdg./psi

Normal Operating Temperature Range

0°C to 50°C 

Input Voltage Required

Max. current at start-up (first 2 sec)

Typical current at seady state

±15 VDC(±5%) @ 200 mA

+13~30VDC(±5%) @ 300 mA (Option)

Set Point Command Signal

0 to 5 VDC (Option 4~20 mA)

Output Signal

0 to 5 VDC (Option 4~20 mA)

Connector Types Analog

9-pin "D" Type 

REMOTE MODE

RS485 , RS232

Wetted Materials Standard Optional

(seals and valve seat)

316L S.S. , Vition , Kalrez

Leak Integrity    External (scc/sec He) Through closed valve

<1 x 10(-9)

<1.0% of F.S. at 40 psig inlet to atmosphere(Toassure no flow-through, a separate positives shut-off valve is recommended.)

Fittings (compatible with)

Swagelok 2 VCR, 

1/2" Swagelok