제품소개  Regulator > 반도체용
- Class 10 clean tunnel for cleaning, assembly, test and packaging operations.
- Electropolished internal finishes as low as 7 Ra microinch or less.
- Standard free poppeet design. Optional Tied Diaphragm design for positive shutoff also available.
- 316L stainless steel coustruction or Hastelloyⓡ C-22 available.
- Leakage 1 x 10-10 atm x cc / sec. He
시리즈명 P1(MPa) P2(Mpa) 유량 재질 구조 비고
U10 14.8 0 ~ 0.99 30NL/min
P1=8MPa
P2=0.15MPa
 SUS316L
진공이중
용해재		 1단식니들변 Metal Seal · 소형
· 입구고압사양
U15 6 0 ~ 0.99 10NL/min
P1=1MPa
P2=0.15MPa		 SUS316L
진공이중
용해재		 1단식니들변 Metal Seal · 소형
· N2O,Cℓ2
사양있음
U20 14.8 0 ~ 0.99 60NL/min
P1=8MPa
P2=0.15MPa		 SUS316L
진공이중
용해재		 1단식니들변 Metal Seal
U25 6 0 ~ 0.99 20NL/min
P1=1MPa
P2=0.15MPa		 SUS316L
진공이중
용해재		 1단식니들변 Metal Seal · N2O,Cℓ2
사양 있음
U31 6 0 ~ 0.99 100NL/min
P1=1MPa
P2=0.15MPa		 SUS316L
진공이중
용해재		 1단식평면Seal변
Metal Seal
U18 0.99 0 ~ 0.6 5NL/min
P1=0.99MPa
P2=0.15MPa		 SUS316L
진공이중
용해재		 1단식니들변 Metal Seal · 1.5″
프록Type
전
자
제
어		 UDM 0.99 0.005 ~ 0.6 50NL/min
P1=0.5MPa
P2=0.3MPa		 SUS316L
진공이중
용해재		 Springless
니들변 Metal Seal		 · 1.5″
프록Type
UDL 0.99 0.005 ~ 0.6 150NL/min
P1=0.5MPa
P2=0.3MPa		 SUS316L
진공이중
용해재		 Springless
니들변 Metal Seal		 · 1.5″
프록Type
시리즈명 P1(MPa) P2(MPa) 유량 재질 구조 비고
R20 14.8 0 ~ 1.2 60NL/min
P1=8MPa
P2=0.15MPa
 SUS316L 1단식니들변  
R25 6 0 ~ 1.2 20NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식니들변 · N2O,Cℓ2
  사양 있음
R35 6 0 ~ 0.99 100NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식니들변 · N2O,Cℓ2
  사양 있음
R61 14.8 0 ~ 0.99 300NL/min
P1=8MPa
P2=0.15MPa		 SUS316L 1단식평면 Seal변  
R71 14.8 0 ~12 25NL/min
P1=8MPa
P2=6MPa		 SUS316L 1단식니들변 · P2고압사양
R81 14.8 0 ~ 0.6 25NL/min
P1=8MPa
P2=0.15MPa		 SUS316L 2단식니들변 · N2O사양 있음
RH1 6 0 ~ 0.99 500NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식평면 Seal변
시리즈명 P1(MPa) P2(MPa) 유량 재질 구조 비고
L10 14.8 0 ~ 0.99 30NL/min
P1=8MPa
P2=0.15MPa
 SUS316L 1단식니들변 Metal Seal · 소형경량
L15 6 0 ~ 0.99 10NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식니들변 Metal Seal · 소형경량
· N2O,Cℓ2
  사양 있음
L18 0.99 0 ~ 0.6 20NL/min
P1=0.99MPa
P2=0.4MPa		 SUS316L
진공이중
용해재		 1단식니들변 Metal Seal · 1.5″
  프록Type
L20 14.8 0 ~ 0.99 60NL/min
P1=8MPa
P2=0.15MPa		 SUS316L 1단식니들변 Metal Seal  
L25 6 0 ~0.99 20NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식니들변 Metal Seal · N2O,Cℓ2
  사양 있음
L35 6 0 ~ 0.9 100NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식니들변 Metal Seal · N2O,Cℓ2
  사양 있음
L61 14.8 0 ~ 0.8 300NL/min
P1=8MPa
P2=0.15MPa		 SUS316L 1단식평면 Seal변
Metal Seal		  
L81 14.8 0 ~ 0.6 25NL/min
P1=2MPa
P2=0.15MPa		 SUS316L 2단식니들변 Metal Seal · N2O,Cℓ2
  사양 있음
· 중간Set압력:
  0.99MPa
L88 14.8 0 ~ 0.99 25NL/min
P1=8MPa
P2=0.15MPa		 SUS316L 2단식평면 Seal변
Metal Seal		 · B2H6용,
  NF3용
· 중간 Set압력:
  3MPa
LH1 6 0 ~ 0.8 500NL/min
P1=1MPa
P2=0.5MPa		 SUS316L 1단식평면 Seal변
Metal Seal		  
LH2 6 0 ~ 0.8 500NL/min
P1=1MPa
P2=0.5MPa		 SUS316L 1단식니들변 Metal Seal N2O,Cℓ2
사양 있음
LL1 2 0 ~ 0.8 1000NL/min
P1=1MPa
P2=0.15MPa		 SUS316L 1단식니들변 Metal Seal  
L96 0.99 -0.1 ~0~ 0.2 5NL/min
P1=대기압
P2=-0.01MPa		 SUS316L 1단식니들변 Metal Seal 절대압 압력
조정기
LS2 2 0 ~ 0.6 20NL/min
P1=1MPa
P2=0.15MPa		 SUS316L Springless 니들변
Metal Seal